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11B sous forme de trifluorure de bore gazeux
Le trifluorure de bore gazeux est le dopant idéal pour les plaquettes de silicium destinées à la production de micropuces hautement intégrées et à haute densité. Le 11BF3 permet d'accroître l'efficacité et le rendement de la production, et contribue à rendre les puces plus petites et plus performantes.
Spécifications
| Customer | : |
| Gas | : 11Boron Trifluoride, Enriched |
| Cylinder No. | : 25A050121 |
| P/N | : 20260603-P01-4710 |
| Valve | : CGA642 |
| Fill Pressure at 70°F(21.1°C) |
: 1388 PSIG nominal |
| Lot No. | : S1-260603-11BF₃-01 |
| Cylinder Size | : 47 L |
| Net weight | : 20,900 g |
| Filling Date | : 2026.06.03 |
| Expiration Date | : 2028.06.02 |
ISOTOPIC ENRICHMENT
| Item | Symbol | Units | Spec. | Control Limit | Det. Limit | Actual Result | Analysis Method |
|---|---|---|---|---|---|---|---|
| Boron-11 | ¹¹B | At. % | >99.992 | ≥99.995 | - | 99.997 | ICP-MS |
| Boron-11 | ¹¹B | Wt. % | >99.992 | ≥99.995 | - | 99.997 | ICP-MS |
CHEMICAL PURITY
| Item | Formula | Units | Spec. | Control Limit | Det. Limit | Actual Result | Analysis Method |
|---|---|---|---|---|---|---|---|
| ¹¹BF₃ | ¹¹BF₃ | mol% | >99.999 | >99.9995 | - | 99.9998 | - |
| Oxygen+Argon | O₂+Ar | ppmv | <1 | 0.004 | 0.008 | GC/DID | |
| Nitrogen | N₂ | ppmv | <2 | - | 0.0075 | 0.065 | GC/DID |
| Carbon Dioxide | CO₂ | ppmv | <2 | 0.0028 | 0.076 | GC/DID | |
| Total Air (O₂+Ar+N₂+CO₂) | ppmv | <5 | 0.149 | ||||
| Methane | CH₄ | ppmv | <0.5 | 0.005 | 0.007 | GC/DID | |
| Carbon Monoxide | CO | ppmv | <2 | 0.0081 | ND | GC/DID | |
| Sulfur Dioxide | SO₂ | ppmv | <1.5 | - | 0.0071 | ND | GC/FPD |
| Silicon Tetrafluoride | SiF₄ | ppmv | <1 | 0.02 | 0.32 | FTIR | |
| Hydrogen Fluoride | HF | ppmv | <2 | 0.02 | 1.66 | FTIR |
* 1.Quantification of isotopic enrichment and metallic ion contents was performed by ICP‑MS with certified reference material calibration and instrumental mass bias correction for isotopic ratios, and calibrated with elemental standard solutions for trace metal analysis.
| # | Area Checked | Detector | MDL | Result | Pass/Fail |
|---|---|---|---|---|---|
| 1 | Diaphragm (Bonnet) | DOD CLPX BF₃ | 98.5 ppb | < 98.5 ppb | PASS |
| 2 | Diaphragm (Weep Hole) | DOD CLPX BF₃ | 98.5 ppb | < 98.5 ppb | PASS |
| 3 | Valve Seat | DOD CLPX BF₃ | 98.5 ppb | < 98.5 ppb | PASS |
| 4 | Valve Outlet Connection | DOD CLPX BF₃ | 98.5 ppb | < 98.5 ppb | PASS |
| 5 | Shank At Valve Neck | DOD CLPX BF₃ | 98.5 ppb | < 98.5 ppb | PASS |
| 6 | Pressure Relief Device | N/A | N/A | N/A | N/A |