<sup>11</sup>B in Form von Bortrifluoridgas

11B in Form von Bortrifluoridgas

Bor-Isotope

Bortrifluoridgas ist das ideale Dotiermittel für Siliziumwafer zur Herstellung von hochintegrierten Mikrochips mit hoher Dichte. 11BF3 sorgt für mehr Effizienz und einen höheren Produktionsdurchsatz und trägt dazu bei, dass die Chips kleiner und besser werden.

Spezifikationen

Customer :
Gas : 11Boron Trifluoride, Enriched
Cylinder No. : 25A050121
P/N : 20260603-P01-4710
Valve : CGA642
Fill Pressure
at 70°F(21.1°C)
: 1388 PSIG nominal
Lot No. : S1-260603-11BF₃-01
Cylinder Size : 47 L
Net weight : 20,900 g
Filling Date : 2026.06.03
Expiration Date : 2028.06.02

ISOTOPIC ENRICHMENT

Item Symbol Units Spec. Control Limit Det. Limit Actual Result Analysis Method
Boron-11 ¹¹B At. % >99.992 ≥99.995 - 99.997 ICP-MS
Boron-11 ¹¹B Wt. % >99.992 ≥99.995 - 99.997 ICP-MS

CHEMICAL PURITY

Item Formula Units Spec. Control Limit Det. Limit Actual Result Analysis Method
¹¹BF₃ ¹¹BF₃ mol% >99.999 >99.9995 - 99.9998 -
Oxygen+Argon O₂+Ar ppmv <1   0.004 0.008 GC/DID
Nitrogen N₂ ppmv <2 - 0.0075 0.065 GC/DID
Carbon Dioxide CO₂ ppmv <2   0.0028 0.076 GC/DID
Total Air (O₂+Ar+N₂+CO₂)   ppmv <5     0.149  
Methane CH₄ ppmv <0.5   0.005 0.007 GC/DID
Carbon Monoxide CO ppmv <2   0.0081 ND GC/DID
Sulfur Dioxide SO₂ ppmv <1.5 - 0.0071 ND GC/FPD
Silicon Tetrafluoride SiF₄ ppmv <1   0.02 0.32 FTIR
Hydrogen Fluoride HF ppmv <2   0.02 1.66 FTIR

* 1.Quantification of isotopic enrichment and metallic ion contents was performed by ICP‑MS with certified reference material calibration and instrumental mass bias correction for isotopic ratios, and calibrated with elemental standard solutions for trace metal analysis.

 

Leak Check
# Area Checked Detector MDL Result Pass/Fail
1 Diaphragm (Bonnet) DOD CLPX BF₃ 98.5 ppb < 98.5 ppb PASS
2 Diaphragm (Weep Hole) DOD CLPX BF₃ 98.5 ppb < 98.5 ppb PASS
3 Valve Seat DOD CLPX BF₃ 98.5 ppb < 98.5 ppb PASS
4 Valve Outlet Connection DOD CLPX BF₃ 98.5 ppb < 98.5 ppb PASS
5 Shank At Valve Neck DOD CLPX BF₃ 98.5 ppb < 98.5 ppb PASS
6 Pressure Relief Device N/A N/A N/A N/A