11B in Form von Bortrifluoridgas
Bortrifluoridgas ist das ideale Dotiermittel für Siliziumwafer zur Herstellung von hochintegrierten Mikrochips mit hoher Dichte. 11BF3 sorgt für mehr Effizienz und einen höheren Produktionsdurchsatz und trägt dazu bei, dass die Chips kleiner und besser werden.
Spezifikationen
| Customer | : |
| Gas | : 11Boron Trifluoride, Enriched |
| Cylinder No. | : 25A050121 |
| P/N | : 20260603-P01-4710 |
| Valve | : CGA642 |
| Fill Pressure at 70°F(21.1°C) |
: 1388 PSIG nominal |
| Lot No. | : S1-260603-11BF₃-01 |
| Cylinder Size | : 47 L |
| Net weight | : 20,900 g |
| Filling Date | : 2026.06.03 |
| Expiration Date | : 2028.06.02 |
ISOTOPIC ENRICHMENT
| Item | Symbol | Units | Spec. | Control Limit | Det. Limit | Actual Result | Analysis Method |
|---|---|---|---|---|---|---|---|
| Boron-11 | ¹¹B | At. % | >99.992 | ≥99.995 | - | 99.997 | ICP-MS |
| Boron-11 | ¹¹B | Wt. % | >99.992 | ≥99.995 | - | 99.997 | ICP-MS |
CHEMICAL PURITY
| Item | Formula | Units | Spec. | Control Limit | Det. Limit | Actual Result | Analysis Method |
|---|---|---|---|---|---|---|---|
| ¹¹BF₃ | ¹¹BF₃ | mol% | >99.999 | >99.9995 | - | 99.9998 | - |
| Oxygen+Argon | O₂+Ar | ppmv | <1 | 0.004 | 0.008 | GC/DID | |
| Nitrogen | N₂ | ppmv | <2 | - | 0.0075 | 0.065 | GC/DID |
| Carbon Dioxide | CO₂ | ppmv | <2 | 0.0028 | 0.076 | GC/DID | |
| Total Air (O₂+Ar+N₂+CO₂) | ppmv | <5 | 0.149 | ||||
| Methane | CH₄ | ppmv | <0.5 | 0.005 | 0.007 | GC/DID | |
| Carbon Monoxide | CO | ppmv | <2 | 0.0081 | ND | GC/DID | |
| Sulfur Dioxide | SO₂ | ppmv | <1.5 | - | 0.0071 | ND | GC/FPD |
| Silicon Tetrafluoride | SiF₄ | ppmv | <1 | 0.02 | 0.32 | FTIR | |
| Hydrogen Fluoride | HF | ppmv | <2 | 0.02 | 1.66 | FTIR |
* 1.Quantification of isotopic enrichment and metallic ion contents was performed by ICP‑MS with certified reference material calibration and instrumental mass bias correction for isotopic ratios, and calibrated with elemental standard solutions for trace metal analysis.

| # | Area Checked | Detector | MDL | Result | Pass/Fail |
|---|---|---|---|---|---|
| 1 | Diaphragm (Bonnet) | DOD CLPX BF₃ | 98.5 ppb | < 98.5 ppb | PASS |
| 2 | Diaphragm (Weep Hole) | DOD CLPX BF₃ | 98.5 ppb | < 98.5 ppb | PASS |
| 3 | Valve Seat | DOD CLPX BF₃ | 98.5 ppb | < 98.5 ppb | PASS |
| 4 | Valve Outlet Connection | DOD CLPX BF₃ | 98.5 ppb | < 98.5 ppb | PASS |
| 5 | Shank At Valve Neck | DOD CLPX BF₃ | 98.5 ppb | < 98.5 ppb | PASS |
| 6 | Pressure Relief Device | N/A | N/A | N/A | N/A |